12/21/2011	12:33:20 AM	Recipe started at 12:33 AM
12/21/2011	12:33:20 AM	Helium valve closed
12/21/2011	12:33:20 AM	H2 valve closed
12/21/2011	12:33:20 AM	BCl3 valve closed
12/21/2011	12:33:20 AM	PH3 valve closed
12/21/2011	12:33:20 AM	SiCl4 pre valve closed
12/21/2011	12:33:20 AM	SiCl4 post valve closed
12/21/2011	12:33:20 AM	Main Vac valve closed
12/21/2011	12:33:20 AM	Bypass valve closed
12/21/2011	12:33:20 AM	Bubbler valve closed
12/21/2011	12:33:20 AM	Helium MFC set to  0.000000
12/21/2011	12:33:20 AM	H2 MFC set to  0.000000
12/21/2011	12:33:20 AM	BCl3 MFC set to  0.000000
12/21/2011	12:33:20 AM	PHl3 MFC set to  0.000000
12/21/2011	12:33:20 AM	SiCl4 MFC set to  0.000000
12/21/2011	12:33:20 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	12:33:20 AM	Tube furnace set to 0
12/21/2011	12:33:23 AM	Helium valve closed
12/21/2011	12:33:23 AM	BCl3 valve closed
12/21/2011	12:33:23 AM	PH3 valve closed
12/21/2011	12:33:23 AM	SiCl4 pre valve closed
12/21/2011	12:33:23 AM	SiCl4 post valve closed
12/21/2011	12:33:23 AM	Main Vac valve closed
12/21/2011	12:33:23 AM	Bypass valve closed
12/21/2011	12:33:23 AM	Bubbler valve closed
12/21/2011	12:33:23 AM	H2 valve opened
12/21/2011	12:33:23 AM	Helium MFC set to  0.000000
12/21/2011	12:33:23 AM	H2 MFC set to  500.000000
12/21/2011	12:33:23 AM	BCl3 MFC set to  0.000000
12/21/2011	12:33:23 AM	PHl3 MFC set to  0.000000
12/21/2011	12:33:23 AM	SiCl4 MFC set to  0.000000
12/21/2011	12:33:23 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	12:33:23 AM	Tube furnace set to 0
12/21/2011	12:34:32 AM	Helium valve closed
12/21/2011	12:34:32 AM	BCl3 valve closed
12/21/2011	12:34:32 AM	PH3 valve closed
12/21/2011	12:34:32 AM	SiCl4 pre valve closed
12/21/2011	12:34:32 AM	SiCl4 post valve closed
12/21/2011	12:34:32 AM	Main Vac valve closed
12/21/2011	12:34:32 AM	Bypass valve closed
12/21/2011	12:34:32 AM	H2 valve opened
12/21/2011	12:34:32 AM	Bubbler valve opened
12/21/2011	12:34:32 AM	Helium MFC set to  0.000000
12/21/2011	12:34:32 AM	H2 MFC set to  500.000000
12/21/2011	12:34:32 AM	BCl3 MFC set to  0.000000
12/21/2011	12:34:32 AM	PHl3 MFC set to  0.000000
12/21/2011	12:34:32 AM	SiCl4 MFC set to  0.000000
12/21/2011	12:34:32 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	12:34:32 AM	Tube furnace set to 0
12/21/2011	12:34:33 AM	Helium valve closed
12/21/2011	12:34:33 AM	BCl3 valve closed
12/21/2011	12:34:33 AM	PH3 valve closed
12/21/2011	12:34:33 AM	SiCl4 pre valve closed
12/21/2011	12:34:33 AM	SiCl4 post valve closed
12/21/2011	12:34:33 AM	Main Vac valve closed
12/21/2011	12:34:33 AM	Bypass valve closed
12/21/2011	12:34:33 AM	H2 valve opened
12/21/2011	12:34:33 AM	Bubbler valve opened
12/21/2011	12:34:33 AM	Helium MFC set to  0.000000
12/21/2011	12:34:33 AM	H2 MFC set to  500.000000
12/21/2011	12:34:33 AM	BCl3 MFC set to  0.000000
12/21/2011	12:34:33 AM	PHl3 MFC set to  0.000000
12/21/2011	12:34:33 AM	SiCl4 MFC set to  0.000000
12/21/2011	12:34:33 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	12:34:33 AM	Tube furnace set to 1000
12/21/2011	12:54:33 AM	Helium valve closed
12/21/2011	12:54:33 AM	BCl3 valve closed
12/21/2011	12:54:33 AM	PH3 valve closed
12/21/2011	12:54:33 AM	Main Vac valve closed
12/21/2011	12:54:33 AM	Bypass valve closed
12/21/2011	12:54:33 AM	H2 valve opened
12/21/2011	12:54:33 AM	SiCl4 pre valve opened
12/21/2011	12:54:33 AM	SiCl4 post valve opened
12/21/2011	12:54:33 AM	Bubbler valve opened
12/21/2011	12:54:33 AM	Helium MFC set to  0.000000
12/21/2011	12:54:33 AM	H2 MFC set to  500.000000
12/21/2011	12:54:33 AM	BCl3 MFC set to  0.000000
12/21/2011	12:54:33 AM	PHl3 MFC set to  0.000000
12/21/2011	12:54:33 AM	SiCl4 MFC set to  50.000000
12/21/2011	12:54:33 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	12:54:34 AM	Tube furnace set to 1000
12/21/2011	1:34:34 AM	Helium valve closed
12/21/2011	1:34:34 AM	BCl3 valve closed
12/21/2011	1:34:34 AM	PH3 valve closed
12/21/2011	1:34:34 AM	SiCl4 pre valve closed
12/21/2011	1:34:34 AM	SiCl4 post valve closed
12/21/2011	1:34:34 AM	Main Vac valve closed
12/21/2011	1:34:34 AM	Bypass valve closed
12/21/2011	1:34:34 AM	H2 valve opened
12/21/2011	1:34:34 AM	Bubbler valve opened
12/21/2011	1:34:34 AM	Helium MFC set to  0.000000
12/21/2011	1:34:34 AM	H2 MFC set to  500.000000
12/21/2011	1:34:34 AM	BCl3 MFC set to  0.000000
12/21/2011	1:34:34 AM	PHl3 MFC set to  0.000000
12/21/2011	1:34:34 AM	SiCl4 MFC set to  0.000000
12/21/2011	1:34:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	1:34:34 AM	Tube furnace set to 950
12/21/2011	1:39:34 AM	Helium valve closed
12/21/2011	1:39:34 AM	BCl3 valve closed
12/21/2011	1:39:34 AM	PH3 valve closed
12/21/2011	1:39:34 AM	SiCl4 pre valve closed
12/21/2011	1:39:34 AM	SiCl4 post valve closed
12/21/2011	1:39:34 AM	Main Vac valve closed
12/21/2011	1:39:34 AM	Bypass valve closed
12/21/2011	1:39:34 AM	H2 valve opened
12/21/2011	1:39:34 AM	Bubbler valve opened
12/21/2011	1:39:34 AM	Helium MFC set to  0.000000
12/21/2011	1:39:34 AM	H2 MFC set to  500.000000
12/21/2011	1:39:34 AM	BCl3 MFC set to  0.000000
12/21/2011	1:39:34 AM	PHl3 MFC set to  0.000000
12/21/2011	1:39:34 AM	SiCl4 MFC set to  0.000000
12/21/2011	1:39:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	1:39:34 AM	Tube furnace set to 850
12/21/2011	1:44:34 AM	H2 valve closed
12/21/2011	1:44:34 AM	BCl3 valve closed
12/21/2011	1:44:34 AM	PH3 valve closed
12/21/2011	1:44:34 AM	SiCl4 pre valve closed
12/21/2011	1:44:34 AM	SiCl4 post valve closed
12/21/2011	1:44:34 AM	Main Vac valve closed
12/21/2011	1:44:34 AM	Bypass valve closed
12/21/2011	1:44:34 AM	Helium valve opened
12/21/2011	1:44:34 AM	Bubbler valve opened
12/21/2011	1:44:34 AM	Helium MFC set to  500.000000
12/21/2011	1:44:34 AM	H2 MFC set to  0.000000
12/21/2011	1:44:34 AM	BCl3 MFC set to  0.000000
12/21/2011	1:44:34 AM	PHl3 MFC set to  0.000000
12/21/2011	1:44:34 AM	SiCl4 MFC set to  0.000000
12/21/2011	1:44:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	1:44:34 AM	Tube furnace set to 0
12/21/2011	2:42:54 AM	Helium valve closed
12/21/2011	2:42:54 AM	H2 valve closed
12/21/2011	2:42:54 AM	BCl3 valve closed
12/21/2011	2:42:54 AM	PH3 valve closed
12/21/2011	2:42:54 AM	SiCl4 pre valve closed
12/21/2011	2:42:54 AM	SiCl4 post valve closed
12/21/2011	2:42:54 AM	Main Vac valve closed
12/21/2011	2:42:54 AM	Bypass valve closed
12/21/2011	2:42:54 AM	Bubbler valve closed
12/21/2011	2:42:54 AM	Helium MFC set to  0.000000
12/21/2011	2:42:54 AM	H2 MFC set to  0.000000
12/21/2011	2:42:54 AM	BCl3 MFC set to  0.000000
12/21/2011	2:42:54 AM	PHl3 MFC set to  0.000000
12/21/2011	2:42:54 AM	SiCl4 MFC set to  0.000000
12/21/2011	2:42:54 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	2:42:54 AM	Tube furnace set to 0
12/21/2011	2:42:55 AM	Run finished at 2:42 AM
12/21/2011	2:55:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2011	2:55:22 AM	Recipe started at 2:55 AM
12/21/2011	2:55:22 AM	Helium valve closed
12/21/2011	2:55:22 AM	H2 valve closed
12/21/2011	2:55:22 AM	BCl3 valve closed
12/21/2011	2:55:22 AM	PH3 valve closed
12/21/2011	2:55:22 AM	SiCl4 pre valve closed
12/21/2011	2:55:22 AM	SiCl4 post valve closed
12/21/2011	2:55:22 AM	Main Vac valve closed
12/21/2011	2:55:22 AM	Bubbler valve closed
12/21/2011	2:55:22 AM	Bypass valve opened
12/21/2011	2:55:22 AM	Helium MFC set to  0.000000
12/21/2011	2:55:22 AM	H2 MFC set to  0.000000
12/21/2011	2:55:22 AM	BCl3 MFC set to  0.000000
12/21/2011	2:55:22 AM	PHl3 MFC set to  0.000000
12/21/2011	2:55:22 AM	SiCl4 MFC set to  0.000000
12/21/2011	2:55:22 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	2:55:22 AM	Tube furnace set to 0
12/21/2011	2:56:41 AM	Helium valve closed
12/21/2011	2:56:41 AM	H2 valve closed
12/21/2011	2:56:41 AM	BCl3 valve closed
12/21/2011	2:56:41 AM	PH3 valve closed
12/21/2011	2:56:41 AM	SiCl4 pre valve closed
12/21/2011	2:56:41 AM	SiCl4 post valve closed
12/21/2011	2:56:41 AM	Main Vac valve closed
12/21/2011	2:56:41 AM	Bubbler valve closed
12/21/2011	2:56:41 AM	Bypass valve opened
12/21/2011	2:56:41 AM	Helium MFC set to  0.000000
12/21/2011	2:56:41 AM	H2 MFC set to  0.000000
12/21/2011	2:56:41 AM	BCl3 MFC set to  0.000000
12/21/2011	2:56:41 AM	PHl3 MFC set to  0.000000
12/21/2011	2:56:41 AM	SiCl4 MFC set to  0.000000
12/21/2011	2:56:41 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	2:56:41 AM	Tube furnace set to 0
12/21/2011	2:56:46 AM	Helium valve closed
12/21/2011	2:56:46 AM	H2 valve closed
12/21/2011	2:56:46 AM	BCl3 valve closed
12/21/2011	2:56:46 AM	PH3 valve closed
12/21/2011	2:56:46 AM	SiCl4 pre valve closed
12/21/2011	2:56:46 AM	SiCl4 post valve closed
12/21/2011	2:56:46 AM	Bypass valve closed
12/21/2011	2:56:46 AM	Bubbler valve closed
12/21/2011	2:56:46 AM	Main Vac valve opened
12/21/2011	2:56:46 AM	Helium MFC set to  0.000000
12/21/2011	2:56:46 AM	H2 MFC set to  0.000000
12/21/2011	2:56:46 AM	BCl3 MFC set to  0.000000
12/21/2011	2:56:46 AM	PHl3 MFC set to  0.000000
12/21/2011	2:56:46 AM	SiCl4 MFC set to  0.000000
12/21/2011	2:56:46 AM	Bypass solenoid MFC set to  0.000000
12/21/2011	2:56:46 AM	Tube furnace set to 0
12/21/2011	2:56:47 AM	Run finished at 2:56 AM
12/21/2011	2:56:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
